Semiconductor device with redistribution layers on partial encapsulation and non-photosensitive passivation layers

ABSTRACT

A semiconductor device with redistribution layers on partial encapsulation is disclosed and may include providing a carrier with a non-photosensitive protection layer, forming a pattern in the non-photosensitive protection layer, providing a semiconductor die with a contact pad on a first surface, and bonding the semiconductor die to the non-photosensitive protection layer such that the contact pad aligns with the pattern formed in the non-photosensitive protection layer. A second surface opposite to the first surface of the semiconductor die, side surfaces between the first and second surfaces of the semiconductor die, and a portion of a first surface of the non-photosensitive protection layer may be encapsulated with an encapsulant. The carrier may be removed leaving the non-photosensitive protection layer bonded to the semiconductor die. A redistribution layer may be formed on the contact pad and a second surface of the non-photosensitive protection layer opposite to the first surface.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of application Ser. No. 15/812,202,filed on Nov. 14, 2017, which is a continuation of application Ser. No.15/069,895, filed on Mar. 14, 2016, now U.S. Pat. No. 9,818,685, whichis a continuation of application Ser. No. 14/337,146, filed on Jul. 21,2014, now U.S. Pat. No. 9,287,229, which makes reference to, claimspriority to, and claims the benefit of Korean Patent Application No.10-2013-0085629, filed on Jul. 19, 2013. Each of the above statedapplications is hereby incorporated herein by reference in theirentirety.

FIELD

Certain embodiments of the disclosure relate to semiconductor chippackaging. More specifically, certain embodiments of the disclosurerelate to a semiconductor device with redistribution layers on partialencapsulation and non-photosensitive passivation layers.

BACKGROUND

In general, a semiconductor device includes a semiconductor diefabricated by fabricating a wafer and forming an integrated circuit (IC)on the wafer. The semiconductor device includes a redistribution layer,a conductive bump, etc. for redistributing circuits and wirings. Inaddition, the semiconductor device may further include a protectionlayer for electrically disconnecting the redistribution layer from thesemiconductor die and fixing the conductive bump. In the semiconductordevice, a photolithography process is used in forming the redistributionlayer and the protection layer. Since photoresist coating, exposing anddeveloping steps are involved in the photolithography process, themanufacturing process may become complicated. In addition, since thenumber of masks used in the process increases, which lowers the yield,resulting in an increase in the manufacturing cost.

Further limitations and disadvantages of conventional and traditionalapproaches will become apparent to one of skill in the art, throughcomparison of such systems with the present disclosure as set forth inthe remainder of the present application with reference to the drawings.

BRIEF SUMMARY

A semiconductor device with redistribution layers on partialencapsulation and non-photosensitive passivation layers, substantiallyas shown in and/or described in connection with at least one of thefigures, as set forth more completely in the claims.

Various advantages, aspects and novel features of the presentdisclosure, as well as details of an illustrated embodiment thereof,will be more fully understood from the following description anddrawings.

BRIEF DESCRIPTION OF SEVERAL VIEWS OF THE DRAWINGS

FIG. 1 is a cross-sectional view of a semiconductor device according toan embodiment of the present disclosure.

FIGS. 2A-2C show an enlarged cross-sectional view and a plan view of aconductive bump shown in FIG. 1.

FIG. 3 is a flowchart illustrating a manufacturing method of thesemiconductor device shown in FIG. 1.

FIGS. 4A to 4H are cross-sectional views illustrating a manufacturingmethod of the semiconductor device shown in FIG. 3.

FIG. 5 is a cross-sectional view of a semiconductor device according toanother embodiment of the present disclosure.

FIG. 6 is a flowchart illustrating a manufacturing method of thesemiconductor device shown in FIG. 5.

FIGS. 7A to 7D are cross-sectional views illustrating a manufacturingmethod of the semiconductor device shown in FIG. 6.

FIG. 8 is a cross-sectional view of a semiconductor device according tostill another embodiment of the present disclosure;

FIG. 9 is a flowchart illustrating a manufacturing method of thesemiconductor device shown in FIG. 8.

FIGS. 10A to 10F are cross-sectional views illustrating a manufacturingmethod of the semiconductor device shown in FIG. 9.

DETAILED DESCRIPTION

Certain aspects of the disclosure may be found in providing a carrierwith a non-photosensitive protection layer, forming a pattern in thenon-photosensitive protection layer, providing a semiconductor die witha contact pad on a first surface, and bonding the semiconductor die tothe non-photosensitive protection layer such that the contact pad alignswith the pattern formed in the non-photosensitive protection layer. Asecond surface opposite to the first surface of the semiconductor die,side surfaces between the first and second surfaces of the semiconductordie, and a portion of a first surface of the non-photosensitiveprotection layer may be encapsulated with an encapsulant. The carriermay be removed leaving the non-photosensitive protection layer bonded tothe semiconductor die. A redistribution layer may be formed on thecontact pad and a second surface of the non-photosensitive protectionlayer opposite to the first surface. A conductive bump may be formed onthe redistribution layer. The encapsulant may be thinned such that thesecond surface of the semiconductor die is coplanar with theencapsulant. A through via may be formed from the redistribution layerthrough the non-photosensitive protection layer and the encapsulant. Atleast a portion of the through via may be filled with conductivematerial. The non-photosensitive protective layer may be patternedutilizing a laser.

Various aspects of the present disclosure may be embodied in manydifferent forms and should not be construed as being limited to theexample embodiments set forth herein. Rather, these example embodimentsof the disclosure are provided so that this disclosure will be thoroughand complete and will fully convey various aspects of the disclosure tothose skilled in the art.

In the drawings, the thickness of layers and regions are exaggerated forclarity. Here, like reference numerals refer to like elementsthroughout. As used herein, the term “and/or” includes any and allcombinations of one or more of the associated listed items. In addition,the terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of the disclosure.As used herein, the singular forms are intended to include the pluralforms as well, unless the context clearly indicates otherwise. It willbe further understood that the terms “comprises” and/or “comprising,”when used in this specification, specify the presence of statedfeatures, numbers, steps, operations, elements, and/or components, butdo not preclude the presence or addition of one or more other features,numbers, steps, operations, elements, components, and/or groups thereof.

It will be understood that, although the terms first, second, etc. maybe used herein to describe various members, elements, regions, layersand/or sections, these members, elements, regions, layers and/orsections should not be limited by these terms. These terms are only usedto distinguish one member, element, region, layer and/or section fromanother. Thus, for example, a first member, a first element, a firstregion, a first layer and/or a first section discussed below could betermed a second member, a second element, a second region, a secondlayer and/or a second section without departing from the teachings ofthe present disclosure.

Referring to FIG. 1, a cross-sectional view of a semiconductor deviceaccording to an embodiment of the present disclosure is illustrated.

As illustrated in FIG. 1, the semiconductor device 100 may comprise asemiconductor die 110 having a plurality of bond pads 111 formedthereon, a first encapsulant 120 encapsulating side portions of thesemiconductor die 110, a non-photosensitive protection layer 130 formedon the semiconductor die 100 and the first encapsulant 120, at least oneredistribution layer 140 formed on the non-photosensitive protectionlayer 130, and a conductive bump 150 connected to the redistributionlayer 140.

The semiconductor die 110 may be substantially panel-shaped having aplanar first surface 110 a and a second surface 110 b opposite to thefirst surface 110 a, and may comprise a plurality of bond pads 111formed on the first surface 110 a. The plurality of bond pads 111 of thesemiconductor die 110 may be electrically connected to theredistribution layer 140. The semiconductor die 110 may further comprisea passivation layer (not shown) formed to cover the first surface 110 ahaving the plurality of bond pads 111 and exposing some of the pluralityof bond pads 111 to the outside. The first surface 110 a of thesemiconductor die 110 may be covered by the non-photosensitiveprotection layer 130, and the plurality of bond pads 111 may be exposedto the outside through the non-photosensitive protection layer 130 tothen be brought into contact with the redistribution layer 140. Thesemiconductor die 110 may comprise a general silicon semiconductor, acompound semiconductor, and equivalents thereof, but not limitedthereto.

The first encapsulant 120 may be formed to encapsulate side portions ofthe semiconductor die 110. That is to say, the first encapsulant 120 maybe formed to encapsulate the side portions between the first surface 110a and the second surface 110 b of the semiconductor die 110 and protectsthe semiconductor die 110 from the external environment. The firstencapsulant 120 may comprise a planar first surface 120 a coplanar withthe first surface 110 a of the semiconductor die 110 and a secondsurface 120 b opposite to the first surface 120 a. Here, the secondsurface 120 b of the first encapsulant 120 may be coplanar with thesecond surface 110 b of the semiconductor die 110. The first surface 120a of the first encapsulant 120 may be covered by the non-photosensitiveprotection layer 130. The first encapsulant 120 may comprise anepoxy-based resin that is an electrically insulating material.

The non-photosensitive protection layer 130 may be formed to cover bothof the first surface 110 a of the semiconductor die 110 and the firstsurface 120 a of the first encapsulant 120 and allows the plurality ofbond pads 111 to be exposed to the outside. That is to say, thenon-photosensitive protection layer 130 may comprise a pattern exposingthe plurality of bond pads 111 to the outside and may be formed to coverthe first surface 110 a of the semiconductor die 110 and the firstsurface 120 a of the first encapsulant 120. The exposed plurality ofbond pads 111 may be electrically connected to the redistribution layer140. The non-photosensitive protection layer 130 may electricallyprotect the semiconductor die 110. The non-photosensitive protectionlayer 130 may be an insulating film formed by printing, spin coating, oran equivalent thereof. The non-photosensitive protection layer 130 maycomprise a non-photosensitive insulating film and may be patterned bylaser without use of a photolithography process. The non-photosensitiveprotection layer 130 may be interposed between the redistribution layer140 and the semiconductor die 110 or between the redistribution layer140 and the first encapsulant 120 and electrically isolate theredistribution layer 140 from the first surface 110 a of thesemiconductor die 110 while protecting the first surface 110 a of thesemiconductor die 110 from the external environment.

The redistribution layer 140 may be formed on the non-photosensitiveprotection layer 130 to make contact with the plurality of bond pads 111exposed to the outside through the non-photosensitive protection layer130. The redistribution layer 140 may be connected to the plurality ofbond pads 111 to then be electrically connected. The redistributionlayer 140 may have various patterns so as to make contact with each ofthe plurality of bond pads 111 and one or more redistribution layers 140may be provided. The one or more redistribution layers 140 may extend tothe non-photosensitive protection layer 130 formed on the first surface120 a of the first encapsulant 120. The redistribution layers 140 may beformed on the non-photosensitive protection layer 130 formed on thefirst surface 110 a of the semiconductor die 110 and at least one of theredistribution layers 140 may extend from the non-photosensitiveprotection layer 130 formed on the first surface 110 a of thesemiconductor die 110 to the non-photosensitive protection layer 130formed on the first surface 120 a of the first encapsulant 120.

A plan view of the redistribution layer 140 is illustrated in FIG. 2A.The redistribution layer 140 may include input/output pads 141 forforming the conductive bump 150 and a connecting part 142 connecting thepad 141 and the plurality of bond pads 111. The input/output pads 141may be substantially circular and may be formed on thenon-photosensitive protection layer 130. The connecting part 142 may beshaped as a line having a predetermined width smaller than a diameter ofthe input/output pads 141.

The redistribution layer 140 may be formed for the purpose of changingpositions of the plurality of bond pads 111 of the semiconductor die 110or changing the number of input/output pads 141. The redistributionlayer 140 may be formed by a photolithography process.

The conductive bump 150 may be formed to make contact with theredistribution layer 140. The conductive bump 150 may be formed on thepad 141 of the redistribution layer 140. The conductive bump 150 may beelectrically connected to the plurality of bond pads 111 of thesemiconductor die 110 through the redistribution layer 140. A plan viewof the redistribution layer 140 having the conductive bump 150 isillustrated in FIG. 2B, and an enlarged cross-sectional view thereof isillustrated in FIG. 2C.

The conductive bump 150 may be hemisphere-shaped where one surface 150 amay be connected to the pad 141 of the redistribution layer 140. Here,the conductive bump 150 further comprises a protruding part 151protruding to the connecting part 142 of the distribution layer 140.That is to say, the conductive bump 150 may be formed directly on thepad 141 of the redistribution layer 140 without a separate protectionlayer and the protruding part 151 may be formed when a portion of theconductive bump 150 flows toward the connecting part 142. Here, since acurvature radius of the conductive bump 150 formed on the pad 141 ismuch larger than that of the protruding part 151, the same surfacetension may be applied to the conductive bump 150 and the protrudingpart 151 in a case where the conductive bump 150 and the protruding part151 comprise the same material. Thus, the conductive bump 150 formed onthe pad 141 may have a much smaller pressure than the protruding part151, thereby preventing the conductive bump 150 from excessivelyspreading toward the connecting part 142. That is to say, the conductivebump 150 may be directly formed on the pad 141 of the redistributionlayer 140 without using a separate protection layer. The conductive bump150 may be a solder bump, and may comprise a material selected from aeutectic solder (e.g., Sn37Pb), a high lead solder (e.g., Sn95Pb), alead-free solder (e.g., SnAg, SnAu, SnCu, SnZn, SnZnBi, SnAgCu, orSnAgBi), but not limited thereto.

Referring to FIG. 3, a flowchart illustrating a manufacturing method ofthe semiconductor device shown in FIG. 1 is illustrated.

As illustrated in FIG. 3, the manufacturing method of the semiconductordevice 100 includes (S1) preparing a carrier, (S2) forming a pattern,(S3) attaching a semiconductor die, (S4) first encapsulating, (S5)removing the carrier, (S6) forming a redistribution layer, (S7) forminga conductive bump, and (S8) back grinding.

The manufacturing method of the semiconductor device 100 will now bedescribed in more detail with reference to FIGS. 4A to 4H.

Referring to FIG. 4A, a cross-sectional view illustrating the step ofpreparing a carrier (S1) in the manufacturing method of thesemiconductor device 100 is illustrated. In the preparing of the carrierstep (S1), a carrier 1 having a non-photosensitive protection layer 130x may be prepared to cover one surface 1 a of the carrier 1. Thenon-photosensitive protection layer 130 x may comprise an insulatingfilm having a predetermined thickness, formed on the one plane 1 a ofthe carrier 1 by printing, spin coating, or an equivalent thereof. Thenon-photosensitive protection layer 130 x may be temporarily adhered tothe carrier 1 using an adhesive (not shown).

Referring to FIG. 4B, a cross-sectional view illustrating the step offorming a pattern (S2) in the manufacturing method of the semiconductordevice 100 is illustrated. In the forming of the pattern step (S2), thenon-photosensitive protection layer 130 x formed on the one plane 1 a ofthe carrier 1 may be patterned by laser to expose a portion of the oneplane 1 a of the carrier 1 to the outside. That is to say, thenon-photosensitive protection layer 130 is a non-photosensitiveinsulating film that can be patterned by laser without using aphotolithography process. The non-photosensitive protection layer 130may be patterned to expose the one plane 1 a of the carrier 1 facing aregion of the semiconductor die 110 where the bond pads 111 are formed.

Referring to FIG. 4C, a cross-sectional view illustrating the step ofattaching a semiconductor die (S3) in the manufacturing method of thesemiconductor device 100 is illustrated. In the attaching of thesemiconductor die step (S3), the semiconductor die 110 may be mounted onthe carrier 1 having the non-photosensitive protection layer 130 toallow the one plane 1 a of the carrier 1 exposed to the outside by thenon-photosensitive protection layer 130 and the plurality of bond pads111 of the semiconductor die 110 to face each other. That is to say, thefirst surface 110 a of the semiconductor die 110 having the plurality ofbond pads 111 formed thereon may be adhered to the non-photosensitiveprotection layer 130. Here, the plane of the semiconductor die 110 maybe smaller than that of the non-photosensitive protection layer 130,thereby allowing an outer portion of the non-photosensitive protectionlayer 130 to be exposed to the outside.

Referring to FIG. 4D, a cross-sectional view illustrating the step offirst encapsulating (S4) in the manufacturing method of thesemiconductor device 100 is illustrated. In the first encapsulating(S4), the first encapsulant 120 x may be formed to encapsulate thesecond surface 110 b opposite to the first surface 110 a of thesemiconductor die 110 and a side surface connecting the first surface110 a and the second surface 110 b. Here, the first encapsulant 120 xmay be formed to cover the non-photosensitive protection layer 130exposed to the outside in the attaching of the semiconductor die (S3).The first encapsulant 120 x may protect the second surface 110 b and theside surface of the semiconductor die 110 from the external environmentin subsequent processes. The first encapsulant 120 x may serve as acarrier for fixing the semiconductor die 110 when transferred toequipment for each process and preventing the semiconductor die 110 frombeing damaged in the subsequent processes. In the first encapsulating(S4), after the forming of the first encapsulant 120 x, the firstencapsulant 120 x may be cured by heat treatment.

Referring to FIG. 4E, a cross-sectional view illustrating the step ofremoving the carrier (S5) in the manufacturing method of thesemiconductor device 100 is illustrated. In the removing of the carrier(S5), the carrier 1 temporarily adhered to the non-photosensitiveprotection layer 130 may be separated and then removed. The carrier 1may be removed by reducing an adhering strength by applying apredetermined stimulus to the adhesive applied to the non-photosensitiveprotection layer 130 and then separating the carrier 1 from thenon-photosensitive protection layer 130. The adhering strength of theadhesive between the carrier 1 and the non-photosensitive protectionlayer 130 may be reduced by heat treatment performed to curing the firstencapsulant 120 x in the first encapsulating (S4), but aspects of thepresent disclosure are not limited thereto. Here, as the carrier 1adhered to the non-photosensitive protection layer 130 is separatedtherefrom and removed in the removing of the carrier (S5), a firstsurface 130 a of the non-photosensitive protection layer 130 opposite toa second surface 130 b that may be in contact with the semiconductor die110, may be exposed to the outside. In addition, the plurality of bondpads 111 of the semiconductor die 110 facing the carrier 1 may beexposed to the outside as the result of removing the carrier 1.

Referring to FIG. 4F, a cross-sectional view illustrating the step offorming the redistribution layer (S6) in the manufacturing method of thesemiconductor device 100 is illustrated. In the forming theredistribution layer step (S6), one or more redistribution layers 140may be formed on the first surface 130 a of the non-photosensitiveprotection layer 130 to be brought into contact with the plurality ofbond pads 111. The redistribution layers 140 may be electricallyconnected to the plurality of bond pads 111 of the semiconductor die110. At least one of the redistribution layers 140 may extend to thefirst surface 130 a of the non-photosensitive protection layer 130formed on the first surface 120 a of the first encapsulant 120 x.

Referring to FIG. 4G, a cross-sectional view illustrating the step offorming a conductive bump (S7) in the manufacturing method of thesemiconductor device 100 is illustrated. In the forming of theconductive bump step (S7), the conductive bump 150 may be formed on theredistribution layer 140. The conductive bump 150 may be electricallyconnected to the redistribution layer 140. The conductive bump 150 maybe electrically connected to the redistribution layer 140 through theredistribution layer 140 and the bond pads 111.

Referring to FIG. 4H, a cross-sectional view illustrating the step ofback grinding (S8) in the manufacturing method of the semiconductordevice 100 is illustrated. In the back grinding step (S8), the firstencapsulant 120 x may be thinned to expose the second surface 110 b ofthe semiconductor die 110 encapsulated by the first encapsulant 120 x tothe outside. That is to say, in the back grinding (S8), a second surface120 bx of the first encapsulant 120 x is subjected to grinding to exposethe second surface 110 b of the semiconductor die 110, thereby allowingonly side portions of the semiconductor die 110 to be encapsulated bythe first encapsulant 120. Here, the first surface 110 a of thesemiconductor die 110 and the first surface 120 a of the firstencapsulant 120 may be coplanar with respect to each other, and thesecond surface 110 b of the semiconductor die 110 and the second surface120 b of the first encapsulant 120 may be coplanar with respect to eachother.

Referring to FIG. 5, a cross-sectional view of a semiconductor deviceaccording to another embodiment of the present disclosure isillustrated.

As illustrated in FIG. 5, the semiconductor device 200 may comprise asemiconductor die 110 having a plurality of bond pads 111 formedthereon, a first encapsulant 220 encapsulating side portions of thesemiconductor die 110, a non-photosensitive protection layer 230 formedon the semiconductor die 200 and the first encapsulant 220, at least oneredistribution layer 140 formed on the non-photosensitive protectionlayer 230, a conductive bump 150 connected to the redistribution layer140, and a conductive connection member 260 electrically connected tothe redistribution layer 140. The semiconductor die 110, theredistribution layer 140 and the conductive bump 150 of thesemiconductor device 200 may be substantially similar to thecorresponding components of the semiconductor device 100 shown inFIG. 1. Therefore, the following description will focus on the firstencapsulant 220, the non-photosensitive protection layer 230 and theconductive connection member 260 of the semiconductor device 200, whichmay be different from the corresponding components of the semiconductordevice 100 shown in FIG. 1.

The first encapsulant 220 may be formed to encapsulate side portions ofthe semiconductor die 110. That is to say, the first encapsulant 220 maybe formed to encapsulate the side portions between the first surface 110a and the second surface 110 b of the semiconductor die 110 and protectsthe semiconductor die 110 from external circumstances. The firstencapsulant 220 has a planar first surface 220 a coplanar with the firstsurface 110 a of the semiconductor die 110 and a second surface 220 bopposite to the first surface 220 a. Here, the second surface 220 b ofthe first encapsulant 220 may be coplanar with the second surface 110 bof the semiconductor die 110. The first surface 220 a of the firstencapsulant 220 may be covered by the non-photosensitive protectionlayer 230. A through-via may be formed in the first encapsulant 220 topass through between the first surface 220 a and the second surface 220b, and the conductive connection member 260 may be formed in thethrough-via to fill the through-via. The first encapsulant 220 maycomprise an epoxy-based resin that is an electrically insulatingmaterial.

The non-photosensitive protection layer 230 may be formed to cover bothof the first surface 110 a of the semiconductor die 110 and the firstsurface 220 a of the first encapsulant 220 and allows the plurality ofbond pads 111 to be exposed to the outside. That is to say, thenon-photosensitive protection layer 230 may comprise a pattern exposingthe plurality of bond pads 111 to the outside and may be formed to coverthe first surface 110 a of the semiconductor die 110 and the firstsurface 220 a of the first encapsulant 220. The exposed plurality ofbond pads 111 may be electrically connected to the redistribution layer140. A second surface 230 b of the non-photosensitive protection layer230 may be brought into contact with the first surface 110 a of thesemiconductor die 110 and with the first surface 220 a of the firstencapsulant 220.

The conductive connection member 260 passing through between the firstsurface 220 a and the second surface 220 b of the first encapsulant 220may also pass through between the first surface 230 a and the secondsurface 230 b of the non-photosensitive protection layer 230. That is tosay, the conductive connection member 260 may pass through the firstencapsulant 220 and the non-photosensitive protection layer 230 to thenbe brought into contact with the redistribution layer 140 formed on thefirst surface 230 a of the non-photosensitive protection layer 230.

The non-photosensitive protection layer 230 may electrically protect thesemiconductor die 110. The non-photosensitive protection layer 230 maybe an insulating film formed by printing, spin coating, or an equivalentthereof. The non-photosensitive protection layer 230 may comprise anon-photosensitive insulating film and may be patterned by laser withoutuse of a photolithography process. The non-photosensitive protectionlayer 230 may be interposed between the redistribution layer 140 and thesemiconductor die 110 and/or between the redistribution layer 140 andthe first encapsulant 220 and may electrically isolate theredistribution layer 140 from the first surface 110 a of thesemiconductor die 110 while protecting the first surface 110 a of thesemiconductor die 110 from the external environment.

The conductive connection member 260 may be formed to pass throughbetween the first surface 220 a and the second surface 220 b of thefirst encapsulant 220 and between the first surface 230 a and the secondsurface 230 b of the non-photosensitive protection layer 230. Theconductive connection member 260 may be connected to the redistributionlayer 140 formed on the first surface 230 a of the non-photosensitiveprotection layer 230. That is to say, the conductive connection member260 may be connected to the second surface 140 b opposite to the firstsurface 140 a of the redistribution layer 140 connected to theconductive bump 150. The conductive connection member 260 may beelectrically connected to the semiconductor die 110 through theredistribution layer 140 and the bond pads 111. The conductiveconnection member 260 may comprise the same material with the conductivebump 150, but aspects of the present disclosure are not limited thereto.

Referring to FIG. 6, a flowchart illustrating a manufacturing method ofthe semiconductor device shown in FIG. 5 is illustrated.

As illustrated in FIG. 6, the manufacturing method of the semiconductordevice 200 comprises several steps preceded by (S1) preparing a carrier,(S2) forming a pattern, (S3) attaching a semiconductor die, (S4) firstencapsulating, (S5) removing the carrier, and (S6) forming aredistribution layer, and only the steps performed after the steps (S1)to (S6) are illustrated. That is to say, the following description willfocus on forming a through-via (S9), forming a conductive connectionmember (S10), forming a conductive bump (S11) and back grinding (S12),which are different from the corresponding processing steps of themanufacturing method shown in FIG. 3. Therefore, the manufacturingmethod of the semiconductor device 200 will be described in more detailwith reference to FIGS. 7A to 7D.

Referring to FIG. 7A, a cross-sectional view illustrating the step offorming a through-via (S9) in the manufacturing method of thesemiconductor device 200 is illustrated. In the forming of thethrough-via (S9), a through-via (V) passing through between the firstsurface 220 a and the second surface 220 bx of the first encapsulant 220x and between the first surface 230 a and the second surface 230 b ofthe non-photosensitive protection layer 230 to expose the second surface140 b of the redistribution layer 140 formed on the first surface 230 aof the non-photosensitive protection layer 230 to the outside. That isto say, the second surface 140 b of the redistribution layer 140 formedon the first surface 230 a of the non-photosensitive protection layer230 is exposed to the second surface 200 bx of the first encapsulant 220through the through-via v.

Referring to FIG. 7B, a cross-sectional view illustrating the step offorming a conductive connection member (S10) in the manufacturing methodof the semiconductor device 200 is illustrated. In the forming of theconductive connection member step (S10), the conductive connectionmember 260 may be formed to fill the through-via (V) formed in the firstencapsulant 220 x and the non-photosensitive protection layer 230. Theconductive connection member 260 may make contact with the secondsurface 140 b of the redistribution layer 140. That is to say, theconductive connection member 260 may be electrically connected to theredistribution layer 140.

Referring to FIG. 7C, a cross-sectional view illustrating the step offorming a conductive bump (S11) in the manufacturing method of thesemiconductor device 200 is illustrated. In the forming of theconductive bump step (S11), a conductive bump 150 may be formed on thefirst surface 140 a of the redistribution layer 140. The conductive bump150 may be electrically connected to the redistribution layer 140. Theconductive bump 150 may be electrically connected to the semiconductordie 110 through the redistribution layer 140 and the bond pads 111.

Referring to FIG. 7D, a cross-sectional view illustrating the step ofback grinding (S12) in the manufacturing method of the semiconductordevice 200 is illustrated. In the back grinding step (S12), the firstencapsulant 220 x may be thinned to expose the second surface 110 b ofthe semiconductor die 110 encapsulated by the first encapsulant 220 x.That is to say, in the back grinding step (S12), the second surface 220bx of the first encapsulant 220 x may be subjected to grinding to exposethe second surface 110 b of the semiconductor die 110, thereby allowingonly side portions of the semiconductor die 110 to be encapsulated bythe first encapsulant 220. Here, the first surface 110 a of thesemiconductor die 110 and the first surface 120 a of the firstencapsulant 220 may be coplanar with respect to each other, and thesecond surface 110 b of the semiconductor die 110 and the second surface120 b of the first encapsulant 220 may be coplanar with respect to eachother.

Referring to FIG. 8, a cross-sectional view of a semiconductor deviceaccording to still another embodiment of the present disclosure isillustrated.

As illustrated in FIG. 8, the semiconductor device 300 comprises asemiconductor die 110 having a plurality of bond pads 111 formedthereon, a first encapsulant 120 encapsulating side portions of thesemiconductor die 110, at least one redistribution layer 340 formed onthe semiconductor die 100 and the first encapsulant 120, a secondencapsulant 370 formed on the redistribution layer 340 and exposing aportion of the redistribution layer 340 to the outside, and a conductivebump 350 connected to the redistribution layer 340 exposed to theoutside through the second encapsulant 370. The semiconductor die 110and the first encapsulant 120 of the semiconductor device 300 may besubstantially similar to corresponding components of the semiconductordevice 100 shown in FIG. 1. Therefore, the following description willfocus on the redistribution layer 340, the second encapsulant 370 andthe conductive bump 350 of the semiconductor device 300, which may bedifferent from the corresponding components of the semiconductor device100 shown in FIG. 1.

The redistribution layer 340 may be formed on the first surface 110 a ofthe semiconductor die 110 to then be brought into contact with theplurality of bond pads 111. The redistribution layer 340 may beconnected to the plurality of bond pads 111 to then be electricallyconnected. The redistribution layer 340 may have various patterns so asto make contact with each of the plurality of bond pads 111 and one ormore redistribution layers 140 may be provided. The one or moreredistribution layers 340 may extend to the first surface 120 a of thefirst encapsulant 120. That is to say, the redistribution layers 340 maybe formed on the first surface 110 a of the semiconductor die 110 and atleast one of the redistribution layers 340 may extend from the firstsurface 110 a of the semiconductor die 110 to the first surface 120 a ofthe first encapsulant 120. The redistribution layer 340 may be formed tohave patterns on the semiconductor die 110 and the first encapsulant 120by silk screen printing. The redistribution layer 340 may be covered bythe second encapsulant 370 and may be electrically connected to theconductive bump 350.

The second encapsulant 370 may be formed on the first surface 110 a ofthe semiconductor die 110, the first surface 120 a of the firstencapsulant 120 and the redistribution layer 340. The second encapsulant370 may comprise a first surface 370 a and a second surface 370 bopposite to the first surface 370 a and making contact with the firstsurface 110 a of the semiconductor die 110, the first surface 120 a ofthe first encapsulant 120 and the redistribution layer 340. Athrough-via may be formed in the second encapsulant 370 to pass throughbetween the first surface 370 a and the second surface 370 b, and theconductive bump 350 may be formed in the through-via to fill thethrough-via. The second encapsulant 370 may comprise the same or similarmaterial with the first encapsulant 120, but aspects of the presentdisclosure are not limited thereto.

The conductive bump 350 may be formed to pass through the first surface370 a and the second surface 370 b of the second encapsulant 370. Theconductive bump 350 may be connected to the redistribution layer 340formed on the first surface 110 a of the semiconductor die 110 and thefirst surface 120 a of the first encapsulant 120. The conductive bump350 may be electrically connected to the semiconductor die 110 throughthe redistribution layer 340. The conductive bump 350 may be shaped tooutwardly protrude more than the first surface 370 a of the secondencapsulant 370. The conductive bump 350 may be a solder bump, and maycomprise a material selected from a eutectic solder (e.g., Sn37Pb), ahigh lead solder (e.g., Sn95Pb), a lead-free solder (e.g., SnAg, SnAu,SnCu, SnZn, SnZnBi, SnAgCu, SnAgBi, etc.), but not limited thereto.

Since the semiconductor device 300 may be formed without using aphotolithography process, the manufacturing process can be simplifiedand the manufacturing cost may be reduced.

Referring to FIG. 9, a flowchart illustrating a manufacturing method ofthe semiconductor device shown in FIG. 8 is illustrated. As illustratedin FIG. 9, the manufacturing method of the semiconductor device includesfirst encapsulating (S1 a), forming a redistribution layer (S2 a),second encapsulating (S3 a), forming a through-via (S4 a), back grinding(S5 a) and forming a conductive bump (S6 a).

The manufacturing method of the semiconductor device 300 will now bedescribed in more detail with reference to FIGS. 10A to 10F.

Referring to FIG. 10A, a cross-sectional view illustrating the step offirst encapsulating (S1 a) in the manufacturing method of thesemiconductor device 300 is illustrated. In the first encapsulating step(S1 a), the first encapsulant 120 x may be formed to encapsulate thesecond surface 110 b of the semiconductor die 110 and a side surfaceconnecting the first surface 110 a and the second surface 110 b of thesemiconductor die 110. Here, the first surface 110 a of thesemiconductor die 110 and the first surface 120 a of the firstencapsulant 120 x may be coplanar with respect to each other. Insubsequent processing steps, the first encapsulant 120 x may protect thesecond surface 110 b and side portions of the semiconductor die 110 fromthe external environment. The first encapsulant 120 x may serve as acarrier for fixing the semiconductor die 110 when transferred toequipment for each process and preventing the semiconductor die 110 frombeing damaged in the subsequent processes.

Referring to FIG. 10B, a cross-sectional view illustrating the step offorming the redistribution layer (S2 a) in the manufacturing method ofthe semiconductor device 300 is illustrated. In the forming theredistribution layer step (S2 a), the redistribution layer 340 may beformed on the first surface 110 a of the semiconductor die 110 and thefirst surface 120 a of the first encapsulant 120 to be brought intocontact with the plurality of bond pads 111 formed on the first surface110 a of the semiconductor die 110. The redistribution layer 340 may beelectrically connected to the plurality of bond pads 111 of thesemiconductor die 110. The redistribution layer 340 may have variouspatterns so as to make contact with each of the plurality of bond pads111 and one or more redistribution layers 140 may be provided. The atleast one redistribution layer 340 may extend to the first surface 110 aof the first encapsulant 120.

Referring to FIG. 10C, a cross-sectional view illustrating the step ofsecond encapsulating (S3 a) in the manufacturing method of thesemiconductor device 300 is illustrated. In the second encapsulatingstep (S3 a), the second encapsulant 370 may be formed to cover all ofthe first surface 110 a of the semiconductor die 110, the first surface120 a of the first encapsulant 120 and the redistribution layer 340. Thesecond encapsulant 370 may comprise a first surface 370 a and a secondsurface 370 b opposite to the first surface 370 a and making contactwith the first surface 110 a of the semiconductor die 110, the firstsurface 120 a of the first encapsulant 120 and the redistribution layer340.

Referring to FIG. 10D, a cross-sectional view illustrating the step offorming a through-via (S4 a) in the manufacturing method of thesemiconductor device 300 is illustrated. In the forming of thethrough-via step (S4 a), a through-via (Vx) passing through between thefirst surface 370 a and the second surface 370 b of the secondencapsulant 370 is formed to expose the redistribution layer 340 to theoutside. The redistribution layer 340 exposed to the outside through thethrough-via (Vx) may be formed on the first surface 120 a of the firstencapsulant 120. That is to say, the redistribution layer 340 formed onthe first surface 120 a of the first encapsulant 120 may be exposed tothe outside through the through-via (Vx) formed on the secondencapsulant 370.

Referring to FIG. 10E, a cross-sectional view illustrating the step ofback grinding (S5 a) in the manufacturing method of the semiconductordevice 300 is illustrated. In the back grinding step (S5 a), the firstencapsulant 120 x may be thinned to expose the second surface 110 b ofthe semiconductor die 110 encapsulated by the first encapsulant 120 x tothe outside. That is to say, in the back grinding step (S5 a), a secondsurface 120 bx of the first encapsulant 120 x may be subjected togrinding to expose the second surface 110 b of the semiconductor die110, thereby allowing only side portions of the semiconductor die 110 tobe encapsulated by the first encapsulant 120. Here, the second surface110 b of the semiconductor die 110 and the second surface 120 b of thefirst encapsulant 120 may be coplanar with respect to each other.

Referring to FIG. 10F, a cross-sectional view illustrating the step offorming a conductive bump (S6 a) in the manufacturing method of thesemiconductor device 300 is illustrated. In the forming of theconductive bump step (S6 a), the conductive bump 350 may be formed tofill the through-via (Vx) formed on the redistribution layer 340. Theconductive bump 350 may be formed to make contact with theredistribution layer 340 exposed to the outside in the forming of thethrough-via step (S4 a). In addition, the conductive bump 350 may beshaped to outwardly protrude beyond the first surface 370 a of thesecond encapsulant 370. The conductive bump 350 may be electricallyconnected to the redistribution layer 340. That is to say, theconductive bump 350 may be electrically connected to the semiconductordie 110 through the redistribution layer 340 and the bond pads 111.

This disclosure provides example embodiments supporting the presentdisclosure. The scope of the present disclosure is not limited by theseexample embodiments. Numerous variations, whether explicitly providedfor by the specification or implied by the specification, such asvariations in structure, dimension, type of material and manufacturingprocess, may be implemented by one skilled in the art in view of thisdisclosure.

In an example embodiment of the disclosure a method is disclosed forproviding a carrier with a non-photosensitive protection layer, forminga pattern in the non-photosensitive protection layer, providing asemiconductor die with a contact pad on a first surface, and bonding thesemiconductor die to the non-photosensitive protection layer such thatthe contact pad aligns with the pattern formed in the non-photosensitiveprotection layer. A second surface opposite to the first surface of thesemiconductor die, side surfaces between the first and second surfacesof the semiconductor die, and a portion of a first surface of thenon-photosensitive protection layer may be encapsulated with anencapsulant. The carrier may be removed leaving the non-photosensitiveprotection layer bonded to the semiconductor die. A redistribution layermay be formed on the contact pad and a second surface of thenon-photosensitive protection layer opposite to the first surface. Aconductive bump may be formed on the redistribution layer. Theencapsulant may be thinned such that the second surface of thesemiconductor die is coplanar with the encapsulant. A through via may beformed from the redistribution layer through the non-photosensitiveprotection layer and the encapsulant. At least a portion of the throughvia may be filled with conductive material. The non-photosensitiveprotective layer may be patterned utilizing a laser.

In another embodiment of the disclosure, a device is disclosedcomprising a semiconductor die having a first surface, a second surfaceopposite to the first surface, and side surfaces between the first andsecond surfaces. An encapsulant may encapsulate the side surfaces of thesemiconductor die. A non-photosensitive protection layer may cover aportion of the first surface of the semiconductor die and a firstsurface of the encapsulant. A contact pad may be on the first surface ofthe semiconductor die, and a redistribution layer may be on thenon-photosensitive protection layer and the contact pad. The secondsurface of the semiconductor die may be coplanar with a surface of theencapsulant. A through via may extend from the redistribution layerthrough the non-photosensitive protection layer and the encapsulant. Thethrough via may be at least partially filled with conductive material.The redistribution layer may comprise a linear portion and a circularpad. A hemispherical conductive bump on the circular pad may comprise aprotruding part extending toward the linear portion and has a radiusless than the hemispherical conductive bump.

The present disclosure provides a semiconductor device and amanufacturing method thereof, which uses a non-photosensitive protectionlayer that can be patterned by laser or which removes an unnecessaryprotection layer, thereby preventing the yield from being lowered or thecost from increasing due to a photolithography process.

In one aspect, the present disclosure provides a semiconductor deviceincluding a semiconductor die having a plurality of bond pads formed onits first surface, a first encapsulant formed to encapsulate sideportions of the semiconductor die, a non-photosensitive protection layerformed on the first surface of the semiconductor die and the firstencapsulant to expose the plurality of bond pads, at least oneredistribution layer formed on the non-photosensitive protection layerto be electrically connected to the exposed plurality of bond pads, anda conductive bump connected to the at least one redistribution layer.

The first encapsulant may include a first surface coplanar with thefirst surface of the semiconductor die and a second surface opposite tothe first surface. The semiconductor device may further include aconductive connection member passing through between the second surfaceof the first encapsulant and the first surface. The conductiveconnection member may pass through the non-photosensitive protectionlayer formed on the first surface of the first encapsulant to then beconnected to the redistribution layer.

The conductive bump may include a protruding part protruding to one sidealong the redistribution layer and shaped of a hemisphere in which itsone planar surface is connected to the redistribution layer.

In another aspect, the present disclosure provides semiconductor deviceincluding semiconductor die having a plurality of bond pads formed onits first surface, a first encapsulant formed to encapsulate sideportions of the semiconductor die, at least one redistribution layerformed on the first surface of the semiconductor die to be electricallyconnected to the plurality of bond pads, a second encapsulant formed onthe first surface of the semiconductor die, the first encapsulant andthe at least one redistribution layer to expose a portion of the atleast one redistribution layer, and a conductive bump connected to theat least one redistribution layer exposed to the outside through thesecond encapsulant.

The at least one redistribution layer may be formed by silk screenprinting. In another aspect, the present disclosure provides amanufacturing method of a semiconductor device, including preparing acarrier having a non-photosensitive protection layer formed therein,forming a pattern on the non-photosensitive protection layer using laserto expose a portion of the carrier, attaching a semiconductor die to thenon-photosensitive protection layer to allow the exposed carrier and aplurality of bond pads provided on the first surface of thesemiconductor die to face each other, first encapsulating for forming afirst encapsulant to cover both of the semiconductor die and thenon-photosensitive protection layer, removing the carrier from thenon-photosensitive protection layer to expose the plurality of bond padsto the outside, and forming at least one redistribution layer on thenon-photosensitive protection layer to be electrically connected to theplurality of bond pads exposed to the outside.

After the forming of the at least one redistribution layer, themanufacturing method may further include forming a conductive bump onthe at least one redistribution layer, and back grinding the firstencapsulant to expose a second surface opposite to the first surface ofthe semiconductor die to the outside.

After the forming of the at least one redistribution layer, themanufacturing method may further include forming a through-via passingthrough the first encapsulant and the non-photosensitive protectionlayer to allow the at least one redistribution layer to be exposed tothe outside, and forming a conductive connection member in thethrough-via to be electrically connected to the redistribution layer.

In the forming of the through-via, the through-via may be formed by alaser drill so as to pass through the first encapsulant and thenon-photosensitive protection layer. After the forming of the conductiveconnection member, the manufacturing method may further include forminga conductive bump on the at least one redistribution layer, and firstgrinding the first encapsulant to expose a second surface opposite tothe first surface of the semiconductor die to the outside.

In still another aspect, the present disclosure provides a manufacturingmethod of a semiconductor device, including first encapsulating forforming a first encapsulant on a first surface of a semiconductor diehaving a plurality of bond pads formed thereon to cover both of a secondsurface opposite to the first surface and a side surface of thesemiconductor die, forming at least one redistribution layer on thefirst surface of the semiconductor die by silk screen printing to beelectrically connected to the plurality of bond pads, secondencapsulating for forming a second encapsulant to cover both of thefirst surface of the semiconductor die and the redistribution layer,forming a through-via passing through the second encapsulant to allowthe at least one redistribution layer to be exposed to the outside, andforming a conductive bump in the through-via to be electricallyconnected to the redistribution layer.

After the forming of the through-via, the manufacturing method mayfurther include back grinding the first encapsulant to expose the secondsurface of the semiconductor die to the outside. In the forming of thethrough-via, the through-via may be formed by a laser drill so as topass through the second encapsulant. As described above, in thesemiconductor device and manufacturing method thereof, anon-photosensitive protection layer that can be patterned by laser isused or an unnecessary protection layer is removed, thereby preventingthe yield from being lowered or the cost from increasing due to aphotolithography process.

While various aspects of the present disclosure have been described withreference to certain supporting embodiments, it will be understood bythose skilled in the art that various changes may be made andequivalents may be substituted without departing from the scope of thepresent disclosure. In addition, many modifications may be made to adapta particular situation or material to the teachings of the presentdisclosure without departing from its scope. Therefore, it is intendedthat the present disclosure not be limited to the particular embodimentsdisclosed, but that the present disclosure will include all embodimentsfalling within the scope of the appended claims.

What is claimed is:
 1. A semiconductor device, comprising: asemiconductor die comprising a first surface, a second surface oppositethe first surface, a contact pad on the first surface, and a sidesurface between the first surface and the second surface; a firstencapsulant comprising a first surface and a second surface opposite thefirst surface, the first encapsulant encapsulating the side surface ofthe semiconductor die; a redistribution structure that comprises aconductive layer that is coupled to the contact pad, the conductivelayer comprising a contact portion that extends over the first surfaceof the first encapsulant; and a second encapsulant comprising a singlelayer of electrically insulating material, wherein the single layer ofelectrically insulating material comprises a first surface and a secondsurface opposite the first surface, and wherein the second surface ofthe single layer of electrically insulating material covers the firstsurface of the semiconductor die, the redistribution structure, and thefirst surface of the first encapsulant and contacts the conductive layerof the redistribution structure.
 2. The semiconductor device of claim 1,further comprising: a via that extends through a first surface of thesecond encapsulant to the contact portion of the conductive layer; and aconductive bump in the via, the conductive bump coupled to the contactportion and protruding beyond the first surface of the secondencapsulant.
 3. The semiconductor device of claim 2, wherein theconductive bump directly contacts the contact portion of the conductivelayer.
 4. The semiconductor device of claim 1, wherein the secondsurface of the second encapsulant directly contacts the first surface ofthe first encapsulant.
 5. The semiconductor device of claim 1, whereinthe second surface of the second encapsulant directly contacts the firstsurface of the semiconductor die.
 6. The semiconductor device of claim1, wherein the second surface of the semiconductor die and the secondsurface of the first encapsulant are coplanar.
 7. The semiconductordevice of claim 1, wherein the first surface of the semiconductor dieand the first surface of the first encapsulant are coplanar.
 8. Thesemiconductor device of claim 1, wherein the first and secondencapsulants comprise a same encapsulant material.
 9. A semiconductordevice, comprising: a semiconductor die comprising a first surface, asecond surface opposite the first surface, a contact pad on the firstsurface, and a side surface between the first surface and the secondsurface; a redistribution structure that is coupled to the contact pad,the redistribution structure comprising a contact portion that extendsbeyond the side surface of the semiconductor die; a single encapsulatingmaterial that encapsulates the first surface of the semiconductor die,the side surface of the semiconductor die, and the redistributionstructure, wherein the single encapsulating material directly contactsthe first surface of the semiconductor die; and a conductive bumpcoupled to the contact portion, contacting the single encapsulatingmaterial, and protruding beyond an outer surface of the singleencapsulating material.
 10. The semiconductor device of claim 9, whereinthe conductive bump directly contacts the contact portion of theredistribution structure.
 11. The semiconductor device of claim 9,wherein a redistribution layer of the redistribution structure directlycontacts the contact pad of the semiconductor die.
 12. The semiconductordevice of claim 9, wherein the single encapsulating material directlycontacts the redistribution structure.
 13. The semiconductor device ofclaim 9, wherein the encapsulating material is provided by a pluralityof layers of the single encapsulating material.
 14. A semiconductordevice, comprising: a semiconductor die comprising a first surface, asecond surface opposite the first surface, a contact pad on the firstsurface, and a side surface between the first surface and the secondsurface; a first encapsulant comprising a first surface and a secondsurface opposite the first surface, the first encapsulant encapsulatingthe side surface of the semiconductor die; a redistribution structurecomprising one or more conductive redistribution layers wherein a firstconductive redistribution layer of the one or more conductiveredistribution layers extends from the contact pad to a contact portionbeyond the side surface of the semiconductor die; a second encapsulantcomprising an epoxy-based resin, wherein the epoxy-based resin coversthe first surface of the semiconductor die and the redistributionstructure, wherein the second encapsulant provides a via aligned withthe contact portion of the first conductive redistribution layer; and aconductive bump coupled to the contact portion through the via providedby the second encapsulant and protruding beyond an outer surface of thesecond encapsulant.
 15. The semiconductor device of claim 14, whereinthe conductive bump directly contacts the contact portion of the firstconductive redistribution layer.
 16. The semiconductor device of claim14, wherein the first conductive redistribution layer directly contactsthe contact pad of the semiconductor die.
 17. The semiconductor deviceof claim 14, wherein the second encapsulant directly contacts the firstsurface of the semiconductor die.
 18. The semiconductor device of claim14, wherein the first encapsulant and the second encapsulant directlycontact the redistribution structure.
 19. The semiconductor device ofclaim 14, wherein the first encapsulant encapsulates the second surfaceof the semiconductor die.